Case Study - CMP retaining rings

A very important step in silicon wafer production is the Chemical Mechanical Planarization (CMP) process.

Novel retaining ring to reduce CMP edge exclusion

Understanding CMP Retaining Rings: Functions & Materials

Typical rotary CMP configuration

Manhole Alternatives for Large Diameter Sewers - Contech

Case study CMP retaining rings

Foun:Snap ring GOLD

1 An Analysis of Potential 450 mm Chemical-Mechanical

Prediction of polishing pressure distribution in CMP process with

Effect of retaining ring slot designs and polishing conditions on