AFM images of Al₂O₃/Gr after ALD cycles, each cycle with pre-H₂O

PDF) Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching

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New atomic layer deposition approaches towards functional materials and devices

AFM images of the Al2O3 films (60 cycles) deposited on graphene flakes

XPS spectra of O 1s and Al 2p (inset) core-level spectra from 60 cycles

PDF) Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition

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The Savannah ALD System - An Excellent Tool for Atomic Layer Deposition

Frontiers Amalgamation of high-κ dielectrics with graphene: A catalyst in the orbit of nanoelectronics and material sciences

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Atomic Layer Deposition (ALD) - ppt video online download