Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Nanomaterials, Free Full-Text

PDF) Stability of SiNx Prepared by Plasma-Enhanced Chemical Vapor Deposition at Low Temperature

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Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

PDF) Nonequilibrium water permeation in SiO2 thin films

(PDF) Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature